Model of refractive-index changes in lithium niobate waveguides fabricated by ion implantation

被引:39
|
作者
Jiang, Yi [1 ]
Wang, Ke-Ming
Wang, Xue-Lin
Chen, Feng
Jia, Chuan-Lei
Wang, Lei
Jiao, Yang
机构
[1] Shandong Univ, Sch Phys & Microelect, Shandong 250100, Peoples R China
[2] Shandong Univ, Sch Informat Sci & Engn, Shandong 250100, Peoples R China
关键词
D O I
10.1103/PhysRevB.75.195101
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A model is presented to explain the refractive-index changes in the ion-implanted LiNbO3 waveguides that indicates that the lattice damage may be the main factor for the refractive-index changes. The model indicates that a slight enhancement may occur for the extraordinary refractive index in the ion-implanted LiNbO3 waveguides with lattice damage ratios of less than 65%, and a maximum positive change (Delta n=0.0338) occurs at a damage ratio of 33%. The model explains both the positive refractive-index changes observed in waveguides formed using 500 keV Si+-ion implantation and the refractive-index changes observed in He+-ion-implanted waveguides.
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收藏
页数:6
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