LOW-FREQUENCY NOISE MEASUREMENT OF A HIGHLY STABLE CHARGE-METER

被引:0
|
作者
Nihtianov, Stoyan [1 ]
Guo, Xiaodong [2 ]
机构
[1] ASML Netherlands BV, Run 6501, NL-5504 DR Veldhoven, Netherlands
[2] Delft Univ Technol, Dept Elect Instrumentat Lab, \, NL-2628 CD Delft, Netherlands
来源
关键词
low-frequency noise; stability; charge-meter; drift;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
A successful effort is reported on an accurate measurement of the low-frequency (1/f) noise and the thermal stability of the charge-meter presented in [1]. These two parameters are very important for the charge-meter, as its main application is to interface capacitive sensors with extremely high long-term stability and low thermal drift. A measurement strategy for the low-frequency noise behavior of the charge-meter is reported. A particular test setup was built and a special test strategy was created to reduce the different kinds of external low-frequency interference to a minimum. This allowed the low-frequency component of the intrinsic input noise of the charge-meter to be measured accurately. An extremely low value of the low-frequency (1/f) noise with corner frequency 2 mHz, and a very high thermal stability of 2 ppm/K of the charge-meter, are reported.
引用
收藏
页码:113 / 118
页数:6
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