Simultaneous Measurement of Refractive Index and Thickness with a Convergent Beam

被引:0
|
作者
Hii, King Ung [1 ,2 ]
Kwek, Kuan Hiang [1 ]
机构
[1] Univ Malaya, Dept Phys, Fac Sci, Kuala Lumpur 50603, Malaysia
[2] Swinburne Univ Technol, Fac Engn Comp & Sci, Kuching 93350, Malaysia
关键词
optical measurements and metrology; refractive index; thickness; optical materials; geometrical optics; LOW-COHERENCE INTERFEROMETRY; TRANSPARENT PLATES; CONFOCAL OPTICS; WAFERS;
D O I
10.1007/s10043-014-0114-x
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new approach to the simultaneous measurement of refractive index and thickness based on the focus shifts of a convergent beam intercepted by a test plate is proposed. By using ray optics, a defined focus shift can be derived as a function of the refractive index and thickness as well as the angular position of the test plate with respect to the optical axis. From a pair of focus shifts obtained at two different angular positions, it is shown that the desired measurands can be simultaneously determined without prior knowledge of either parameter. A simulation result for the proposed concept based on graphically solving the equations of their respective focus shifts is presented. (C) 2014 The Japan Society of Applied Physics
引用
收藏
页码:705 / 708
页数:4
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