Recent deposition techniques of DLC and diamond films and their properties

被引：0
|
作者：
Tanaka, A [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2002年 / 47卷 / 11期
关键词：
DLC film; diamond film; plasma CVD; ion beam deposition; PBII; magnetron sputter; friction; wear; hardness;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：802 / 808
页数：7
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