Design, Fabrication and Demonstration of a 1x20 Multimode Interference Splitter for Parallel Biosensing Applications

被引:2
|
作者
Najeeb, N. [1 ,3 ]
Zhang, Y. [1 ]
Mellor, C. J. [2 ]
Benson, T. M. [3 ]
机构
[1] Univ Nottingham Ningbo China, Dept Elect & Elect Engn, 199 Taikang East Rd, Ningbo 315100, Zhejiang, Peoples R China
[2] Univ Nottingham, Sch Phys & Astron, Univ Pk, Nottingham NG7 2RD, England
[3] Univ Nottingham, Dept Elect & Elect Engn, Univ Pk, Nottingham NG7 2RD, England
关键词
IMAGE-FORMATION; WAVE-GUIDES; INTERFEROMETER; PERFORMANCE; COUPLERS; DEVICES; ARRAY;
D O I
10.1088/1742-6596/679/1/012027
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper presents the experimental achievement of a silicon-on-insulator 1x20 MMI splitter andsimulation evaluations of the TE-like and TM-like mode MMI splitters for parallel biosensing applications. Device fabrication technology and optical characterisation results are provided.
引用
收藏
页数:9
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