Laser crystallization and annealing of ferroelectric thin films

被引:0
|
作者
Zhu, JS [1 ]
Lu, XM [1 ]
Liu, X [1 ]
Tian, W [1 ]
Yang, Z [1 ]
Wang, YN [1 ]
机构
[1] NANJING UNIV,NATL LAB SOLID STATE MICROSTRUCT,NANJING 210093,PEOPLES R CHINA
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T [工业技术];
学科分类号
08 ;
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页码:413 / 416
页数:4
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