Filtered cathodic arc deposited diamond like carbon: Electron spin resonance (ESR) and Raman spectroscopy

被引：0
|
作者：
Druz, B [1 ]
Zaritskiy, I [1 ]
Yevtukhov, Y [1 ]
Konchits, A [1 ]
Valakh, M [1 ]
Kolesnik, S [1 ]
Shanina, B [1 ]
Visotski, V [1 ]
机构：
[1] Veeco Instruments Inc, Plainview, NY 11803 USA
来源：
AMORPHOUS AND NANOSTRUCTURED CARBON | 2000年 / 593卷
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tetrahedral diamond like carbon (ta-C) films were deposited onto Si substrates using Filtered Cathodic Vacuum Are (FCVA) process. Stress of deposited films was varied in the range 3.5 divided by 8.5 Cpa. The ESR (stationary and pulse) and Raman techniques were used to analyze spl related defects in the pseudo-gap of undoped, as deposited 20 - 100 nm thick films. The results are compared with data for direct ion beam deposited from CH4 plasma hydrogenated DLHC films and nature of paramagnetic defects in DLC is discussed.
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页码：249 / 254
页数：6
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