Patterning spherical surfaces at the two-hundred-nanometer scale using soft lithography

被引：80
|
作者：
Paul, KE [1 ]
Prentiss, M
Whitesides, GM
机构：
[1] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
[2] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
来源：
ADVANCED FUNCTIONAL MATERIALS | 2003年 / 13卷 / 04期
关键词：
D O I：
10.1002/adfm.200304255
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Two soft lithographic techniques-topographically directed photolithography (TOP) and near-field contact-mode photolithograph-have been used to pattern spherical surfaces with features as small as 175 nm. Each technique has the ability to pattern more than a 60degrees arc of a spherical surface, albeit with distortions at the edge. Use as an optical polarizer demonstrates an application of these types of patterned surface.
引用
收藏
页码：259 / 263
页数：5
相关论文
共 50 条
  • [21] Nanometer scale patterning using focused ion beam milling
    Petit, D
    Faulkner, CC
    Johnstone, S
    Wood, D
    Cowburn, RP
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (02): : 026105 - 1
  • [22] Imaging and Patterning on Nanometer Scale Using Coherent EUV Light
    Wachulak, P. W.
    Marconi, M. C.
    Menoni, C. S.
    Rocca, J. J.
    Fiedorowicz, H.
    Bartnik, A.
    ACTA PHYSICA POLONICA A, 2010, 117 (02) : 403 - 407
  • [23] NANOMETER-SCALE LITHOGRAPHY USING THE ATOMIC FORCE MICROSCOPE
    MAJUMDAR, A
    ODEN, PI
    CARREJO, JP
    NAGAHARA, LA
    GRAHAM, JJ
    ALEXANDER, J
    APPLIED PHYSICS LETTERS, 1992, 61 (19) : 2293 - 2295
  • [24] Soft lithography based micron-scale electrophoretic patterning of purple membrane
    Crittenden, S
    Reifenberger, R
    Hillebrecht, J
    Birge, R
    Inerowicz, D
    Regnier, F
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (08) : 1494 - 1497
  • [25] Nanometer-scale patterning of hard and soft interfaces: from photolithography to molecular-scale design
    Singh, Anamika
    Shi, Anni
    Claridge, Shelley A.
    CHEMICAL COMMUNICATIONS, 2022, 58 (94) : 13059 - 13070
  • [26] Modifying the antibacterial performance of Cu surfaces by topographic patterning in the micro- and nanometer scale
    Mueller, Daniel Wyn
    Pauly, Christoph
    Brix, Kristina
    Kautenburger, Ralf
    Muecklich, Frank
    BIOMATERIALS ADVANCES, 2025, 169
  • [27] MECHANISTIC INVESTIGATIONS OF NANOMETER-SCALE LITHOGRAPHY AT LIQUID-COVERED GRAPHITE SURFACES
    PENNER, RM
    HEBEN, MJ
    LEWIS, NS
    QUATE, CF
    APPLIED PHYSICS LETTERS, 1991, 58 (13) : 1389 - 1391
  • [28] Direct Patterning of Zinc Sulfide on a Sub-10 Nanometer Scale via Electron Beam Lithography
    Saifullah, Mohammad S. M.
    Asbahi, Mohamed
    Kiyani, Maryam Binti-Kamran
    Tripathy, Sudhiranjan
    Ong, Esther A. H.
    Ibn Saifullah, Asadullah
    Tan, Hui Ru
    Dutta, Tanmay
    Ganesan, Ramakrishnan
    Valiyaveettil, Suresh
    Chong, Karen S. L.
    ACS NANO, 2017, 11 (10) : 9920 - 9929
  • [29] Study of Krafty Glue patterning thin films using soft lithography
    Ravisankar, M. S.
    MATERIALS TODAY-PROCEEDINGS, 2020, 33 : 4082 - 4083
  • [30] Patterning protein molecules on surfaces using scanning probe lithography.
    Liu, GY
    Wadu-methrige, K
    Amro, NA
    Xu, S
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 219 : U280 - U280
12345