Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow

被引:0
|
作者
Hu, Juejun [1 ]
Feng, Ning-Ning [1 ]
Agarwal, Anu [1 ]
Kimerling, Lionel [1 ]
Carlie, Nathan [2 ]
Petit, Laeticia [2 ]
Richardson, Kathleen [2 ]
机构
[1] MIT, Microphoton Ctr, 77 Massachusetts Ave, Cambridge, MA 02139 USA
[2] Clemson Univ, COMSET, Sch Mat Sci & Engn, Clemson, SC 29634 USA
关键词
FABRICATION;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in AS(2)S(3) chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved. (C)2009 Optical Society of America
引用
收藏
页码:1505 / +
页数:2
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