Design of Ultra-Large-Coupling SH0 Plate Wave Resonators on LiNbO3 with Clean Spectrum

被引：0

作者：

Zou, J. ^{[1
]}

Iliev, F. ^{[1
]}

Hammond, R. B. ^{[1
]}

Samadian, S. ^{[1
]}

Thorvaldsson, T. ^{[1
]}

Turner, P. J. ^{[1
]}

Yantchev, V ^{[1
]}

Fenzi, N. O. ^{[1
]}

Plessky, V ^{[2
,3
]}

机构：

[1] Resonant Inc, Santa Barbara, CA 93117 USA

[2] GVR Trade SA, Gorgier, Switzerland

[3] Resonant Inc, Gorgier, Switzerland

来源：

PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019) | 2019年

关键词：

SH0; mode; Plate mode; coupling coefficient; LiNbO3; wide band; LAMB;

D O I：

10.1109/fcs.2019.8856043

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This study lays a foundation for the design of the SH0 Plate acoustic wave (PAW) resonator based on LiNbO3 plate applicable to the ultra-wide-band filters and next-generation tunable filters. The coupling coefficient (k(2)) of SK I mode is optimized to as high as 55% by analyzing the propagation characteristics of Plate modes in LiNbO 3 membrane with different cut angle and normalized thicknesses. The SH0 mode is demonstrated to be slowly dispersive and it features the superiority of interdigital transducer (EDT) - defining frequency over most other Plate modes. On device level, the transducer types, transducer materials and thicknesses are investigated and compared. In addition, both the out-of-band (plate modes mainly) and in-band spurious modes (longitudinal modes) are investigated and suppressed for the SH0 PAW resonators.

引用

页数：6

共 22 条

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