Femtosecond laser machining of silica and transparent materials

被引：3
|
作者：
Babiy, M. Yu [1 ]
Golik, S. S. [1 ]
Kolesnikov, A. V. [1 ]
Bystrov, F. G. [1 ]
机构：
[1] Far Eastern State Univ, Vladivostok 690600, Russia
来源：
Development of Industrial Manufacturing | 2014年 / 525卷
关键词：
Femtosecond laser; ablation; silica ablation; laser micromachining; femtosecond machining; glass; nanoposition;
D O I：
10.4028/www.scientific.net/AMM.525.128
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
Recently, interest in the study of processes occurring in the optical breakdown on the surface of solid targets associated with the increasing number of practical applications of the laser spark, such as laser induced breakdown spectroscopy and micro-and nano-materials processing. One of the most important tasks - to reduce the diameter of the focal spot, because the size of the modifications directly related to it. However, it is not the only problem faced by the transition to sub-micron range modifications.
引用
收藏
页码：128 / 132
页数：5
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