Single-mode holey vertical-cavity surface-emitting laser with ultra-narrow beam divergence

被引：21
|
作者：
Liu, A. J. [1 ]
Chen, W. [1 ]
Qu, H. W. [1 ]
Jiang, B. [1 ]
Zhou, W. J. [1 ]
Xing, M. X. [1 ]
Zheng, W. H. [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
来源：
LASER PHYSICS LETTERS | 2010年 / 7卷 / 03期
基金：
中国国家自然科学基金; 国家高技术研究发展计划(863计划);
关键词：
divergence angle; graded index profile; low index step; single mode; vertical-cavity surface-emitting laser; WAVE-GUIDE; POWER; VCSELS; INDEX; DEPTH;
D O I：
10.1002/lapl.200910130
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrated oxide-confined 850-nm vertical-cavity surface-emitting lasers (VCSELs) with a two-dimensional petal-shaped holey structure composed of several annular-sector-shaped holes. Four types of devices with different hole numbers were designed and fabricated. The measured results showed that the larger hole number was beneficial to purifying the lasing mode, and realizing the single-mode operation. The side mode suppression ratio (SMSR) exceeded 30 dB throughout the entire drive current. Mode selective loss mechanism was used to explain the single-mode characteristic. The single-mode devices possessed good beam profiles, and the lowest divergence angle was as narrow as 3.2 degrees (full width at half maximum), attributed to the graded index profile and the shallow etching in the top distributed Bragg reflector (DBR). [GRAPHICS] Scanning electron microscope (SEM) image of the fabricated device (C) 2010 by Astro Ltd. Published exclusively by WILEY-VCH Verlag GmbH & Co. KGaA
引用
收藏
页码：213 / 217
页数：5
相关论文
共 50 条
  • [21] Stable Single-Mode 795 nm Vertical-Cavity Surface-Emitting Laser for Quantum Sensing
    Wang, Yongli
    Zhang, Yang
    Li, Chuanchuan
    Li, Jian
    Wei, Xin
    Chen, Lianghui
    MATERIALS, 2024, 17 (19)
  • [22] 1550-nm vertical-cavity surface-emitting laser with single-mode power of milliwatts
    Zhang Jian-Wei
    Zhang Xing
    Zhou Yin-Li
    Li Hui
    Wang Yan-Bing
    Chen Zhi-Ming
    Xu Jia-Qi
    Ning Yong-Qiang
    Wang Li-Jun
    ACTA PHYSICA SINICA, 2022, 71 (06)
  • [23] High-power single-mode vertical-cavity surface-emitting lasers
    Samal, N
    Johnson, SR
    Ding, D
    Samal, AK
    Yu, SQ
    Zhang, YH
    APPLIED PHYSICS LETTERS, 2005, 87 (16) : 1 - 3
  • [24] Photonic crystals - Enable single-mode vertical-cavity surface-emitting lasers
    Leisher, Paul O.
    Choquette, Kent D.
    PHOTONICS SPECTRA, 2006, 40 (06) : 94 - +
  • [25] Progress in Single-Mode and Directly Modulated Vertical-Cavity Surface-Emitting Lasers
    Liu Anjin
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2020, 47 (07):
  • [26] Single-mode vertical-cavity surface-emitting laser with ring-shaped light-emitting aperture
    Shi, JW
    Jiang, CH
    Chen, KM
    Yen, JL
    Yang, YJ
    APPLIED PHYSICS LETTERS, 2005, 87 (03)
  • [27] High-power single-mode vertical-cavity surface-emitting lasers with multi-leaf holey structure
    Yang, Hung-Pin D.
    Hsu, I.-Chen
    Lai, Fang-I.
    Kuo, Hao-Chung
    Chi, Jim Y.
    Japanese Journal of Applied Physics, Part 2: Letters, 2006, 45 (33-36):
  • [28] High-power single-mode vertical-cavity surface-emitting lasers with multi-leaf holey structure
    Yang, Hung-Pin D.
    Hsu, I-Chen
    Lai, Fang-I
    Kuo, Hao-Chung
    Chi, Jim Y.
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (33-36): : L871 - L873
  • [29] High-Resolution FMCW Reflectometry Using a Single-Mode Vertical-Cavity Surface-Emitting Laser
    Iiyama, Koichi
    Matsui, Shin-ichiro
    Kobayashi, Takao
    Maruyama, Takeo
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2011, 23 (11) : 703 - 705
  • [30] Gaussian etched single transverse mode vertical-cavity surface-emitting laser
    Sargent, L.J.
    Plouzennec, L.
    Penty, R.V.
    White, I.H.
    Heard, P.J.
    2000, IEEE, Piscataway : 166 - 167
12345