Universal Modeling of the Bulk Acoustic Wave Devices

Highly efficient self-consistent 1D-model is proposed allowing us to describe arbitrary BAW devices, including the tunable ones. Applying that approach one can analyze, in the frame of the same software, a system with arbitrary number and sequence of dielectric and meta I layers under arbitrary inter-electrode connections. It is shown that one can fluently control the resonant frequency of solidly mounted BAW resonator over a fractional frequency range > 1% (being much wider than the system temperature drift).