Universal Modeling of the Bulk Acoustic Wave Devices

被引：1

作者：

Sveshnikov, Boris ^{[1
]}

机构：

[1] State Univ, Nizhnii Novgorod, Russia

来源：

2009 JOINT MEETING OF THE EUROPEAN FREQUENCY AND TIME FORUM AND THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2009年

关键词：

D O I：

10.1109/FREQ.2009.5168223

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Highly efficient self-consistent 1D-model is proposed allowing us to describe arbitrary BAW devices, including the tunable ones. Applying that approach one can analyze, in the frame of the same software, a system with arbitrary number and sequence of dielectric and meta I layers under arbitrary inter-electrode connections. It is shown that one can fluently control the resonant frequency of solidly mounted BAW resonator over a fractional frequency range > 1% (being much wider than the system temperature drift).

引用

页码：466 / 469

页数：4

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