共 36 条
- [26] Surface Micro-Structuring of Silica Glass by Laser-Induced Backside Wet Etching with ns-Pulsed UV Laser at a High Repetition Rate JOURNAL OF LASER MICRO NANOENGINEERING, 2006, 1 (01): : 39 - 43
- [27] KrF-excimer laser-induced native oxide removal from Si(100) surfaces studied by Auger electron spectroscopy APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 62 (02): : 103 - 114