A Tool for Aided Multi-Scale Model Derivation and its Application to the Simulation of a Micro Mirror Array

被引：0

作者：

Belkhir, Walid ^{[1
,2
]}

Ratier, Nicolas ^{[1
]}

Duy Duc Nguyen ^{[1
]}

Nguyen Nhat Binh Trinh ^{[1
]}

Lenczner, Michel ^{[1
]}

Zamkotsian, Frederic ^{[3
]}

机构：

[1] Univ Bourgogne Franche Comte, FEMTO ST Inst, CNRS, ENSMM Time & Frequency Dept, 26 Rue Epitaphe, F-25030 Besancon, France

[2] INRIA Nancy Grand Est, Pesto Project, F-54600 Villers Les Nancy, France

[3] LAM CNRS, Marseille, France

来源：

2017 18TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2017年

关键词：

Rewriting Strategies; Periodic Homogenization; Micro-Mirror Array; Extension-Combination Method;

D O I：

暂无

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

Modeling the electric field in a matrix of micro-mirrors is presented as the first application of the MEMSALab software package. The latter is dedicated to semi-automated derivation of multiscale models by asymptotic methods and will complement simulation software as finite element software. It is designed according to a principle of reusability which is called the extension-combination method developed with techniques derived from the theory of rewriting.

引用

页数：8

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