A Tool for Aided Multi-Scale Model Derivation and its Application to the Simulation of a Micro Mirror Array

被引：0
|
作者：
Belkhir, Walid [1 ,2 ]
Ratier, Nicolas [1 ]
Duy Duc Nguyen [1 ]
Nguyen Nhat Binh Trinh [1 ]
Lenczner, Michel [1 ]
Zamkotsian, Frederic [3 ]
机构：
[1] Univ Bourgogne Franche Comte, FEMTO ST Inst, CNRS, ENSMM Time & Frequency Dept, 26 Rue Epitaphe, F-25030 Besancon, France
[2] INRIA Nancy Grand Est, Pesto Project, F-54600 Villers Les Nancy, France
[3] LAM CNRS, Marseille, France
来源：
2017 18TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2017年
关键词：
Rewriting Strategies; Periodic Homogenization; Micro-Mirror Array; Extension-Combination Method;
D O I：
暂无
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
Modeling the electric field in a matrix of micro-mirrors is presented as the first application of the MEMSALab software package. The latter is dedicated to semi-automated derivation of multiscale models by asymptotic methods and will complement simulation software as finite element software. It is designed according to a principle of reusability which is called the extension-combination method developed with techniques derived from the theory of rewriting.
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页数：8
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