APCVD Preparation of TiNxOy film for multi-functional coating glass

被引：0
|
作者：
Duan, Gangfeng [1 ]
Zhao, Gaoling [1 ]
Lin, Xiaoxuan [1 ]
Zhang, Tianbo [1 ]
Han, Gaorong [1 ]
机构：
[1] Zhejiang Univ, Dept Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China
来源：
2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2 | 2009年
关键词：
atmospheric pressure chemical vapor deposition; TiN(x)O(y) film; multi-functional coating glass; SOLAR CONTROL;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A simple atmospheric pressure chemical vapor deposition method was employed to deposit TIN(x)O(y) film on glass substrate The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.
引用
收藏
页码：833 / 834
页数：2
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