A plasma-cathode electron gun for beam generation in the forevacuum pressure range

被引：0
|
作者：
Mytnikov, AV [1 ]
Oks, EM [1 ]
Chagin, AA [1 ]
机构：
[1] Tomsk State Univ Control & Radioelect Syst, Tomsk 634050, Russia
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1998年 / 41卷 / 02期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of similar to 100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
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页码：234 / 236
页数：3
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