Piezoelectric microactuators for use in magnetic disk drives

被引：4
|
作者：
Kurihara, K
Hida, M
Umemiya, S
Koganezawa, S
机构：
[1] Fujitsu Labs Ltd, Mat & Environm Engn Labs, Kanagawa 2430197, Japan
[2] Fujitsu Ltd, HDD Dev Dept, Kanagawa 2118588, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2004年 / 43卷 / 9B期
关键词：
PNN-PT-PZ; microactuator; magnetic disk drive;
D O I：
10.1143/JJAP.43.6725
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A head-slider drive dual-stage microactuator system for use in magnetic disk drives was developed. This microactuator system has a symmetrical structure and operation, and utilizes simple rectangular multilayered piezoelectric actuator devices. A prototype model with a pico slider and head suspension was tested and demonstrated. It exhibited a 0.8 mum displacement at a do applied voltage of 30 V and a fundamental resonant frequency of over 20 kHz.
引用
收藏
页码：6725 / 6727
页数：3
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