Influence of polarization Coulomb field scattering on high-temperature electron mobility in AlGaN/AlN/GaN heterostructure field-effect transistors

被引:5
|
作者
Liu, Yan [1 ]
Lin, Zhaojun [2 ]
Cui, Peng [2 ]
Fu, Chen [2 ]
Lv, Yuanjie [3 ]
Cheng, Zhiqun [1 ]
机构
[1] Hangzhou Dianzi Univ, Coll Elect & Informat, Hangzhou 310018, Zhejiang, Peoples R China
[2] Shandong Univ, Sch Microelect, Jinan 250100, Shandong, Peoples R China
[3] Hebei Semicond Res Inst, Natl Key Lab Applicat Specif Integrated Circuit A, Shijiazhuang 050051, Hebei, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/AlN/GaN HFET; High-temperature electron mobility; Polarization Coulomb field scattering; STRAIN; BIAS;
D O I
10.1016/j.spmi.2018.05.016
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The high-temperature electron mobility (HT) of the AlGaN/AlN/GaN heterostructure field-effect transistor (HFET) has been studied in the temperature range 300-500 K. Here, the influence of the polarization Coulomb field (PCF) scattering on mu(HT) in AlGaN/AlN/GaN HFET draws our attention, and the experimental results have revealed that PCF scattering plays a more significant role in the changing trend of the electron mobility versus the two-dimensional electron gas (2DEG) density at high temperature. Moreover, PCF scattering is found to vary with increasing temperature, which is closely related to the variation of the interaction between the additional positive polarization charges underneath the gate contact and the additional negative polarization charges near the source Ohmic contact with temperature. Therefore, PCF scattering is still an important scattering mechanism at high temperature. This finding is of great benefit to the optimization of the performance of AlGaN/AlN/GaN HFET at elevated temperature by designing the appropriate device structure based on PCF scattering.
引用
收藏
页码:389 / 394
页数:6
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