A facile and efficient dry transfer technique for two-dimensional Van der Waals heterostructure

被引:9
|
作者
Xie, Li [1 ,2 ,3 ]
Du, Luojun [1 ,2 ]
Lu, Xiaobo [1 ,2 ,3 ]
Yang, Rong [1 ,2 ,3 ]
Shi, Dongxia [1 ,2 ,3 ]
Zhang, Guangyu [1 ,2 ,3 ,4 ,5 ]
机构
[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100190, Peoples R China
[3] Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100190, Peoples R China
[4] Collaborat Innovat Ctr Quantum Matter, Beijing 100190, Peoples R China
[5] Beijing Key Lab Nanomat & Nanodevices, Beijing 100190, Peoples R China
基金
中国国家自然科学基金;
关键词
two-dimensional materials; Van der Waals heterostructure; Propylene Carbonate; transfer; HIGH-QUALITY; MOS2; FILMS; LAYER; GRAPHENE; UNIVERSAL;
D O I
10.1088/1674-1056/26/8/087306
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Two-dimensional (2D) Van der Waals heterostructures have aroused extensive concerns in recent years. Their fabrication calls for facile and efficient transfer techniques for achieving well-defined structures. In this work, we report a simple and effective dry transfer method to fabricate 2D heterostructures with a clean interface. Using Propylene Carbonate (PC) films as stamps, we are able to pick up various 2D materials flakes from the substrates and unload them to the receiving substrates at an elevated temperature. Various multilayer heterostructures with ultra-clean interfaces were fabricated by this technique. Furthermore, the 2D materials can be pre-patterned before transfer so as to fabricate desired device structures, demonstrating a facile way to promote the development of 2D heterostructures.
引用
收藏
页数:6
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