Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector

被引：1

作者：

Zeng Kun ^{[1
]}

Duan Xiao-feng ^{[1
]}

Huang Yong-qing ^{[1
]}

Liu Kai ^{[1
]}

Ren Xiao-min ^{[1
]}

机构：

[1] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China

来源：

OPTOELECTRONICS LETTERS | 2019年 / 15卷 / 04期

基金：

高等学校博士学科点专项科研基金; 中国国家自然科学基金;

关键词：

D O I：

10.1007/s11801-019-8141-2

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Novel construction of a resonant-cavity-enhanced photodetector (RCE-PD) with monolithic high-contrast grating (HCG) is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure, HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration. During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 mu m is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.

引用

页码：250 / 254

页数：5

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