Free-molecular Gas Flow Through the High-frequency Oscillating Membrane

被引：0
|
作者：
Yakunchikov, Artem [1 ]
Kovalev, Valery [1 ]
Kosiantchouk, Vasili [1 ]
机构：
[1] Moscow MV Lomonosov State Univ, GSP 1, Moscow 119991, Russia
来源：
PROCEEDINGS OF THE 29TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS | 2014年 / 1628卷
关键词：
membrane; separation of gases; high-frequency oscillations; MEMS; NEMS; free-molecular flow; ACCOMMODATION COEFFICIENTS; GRAPHITE SURFACE; HYDROGEN;
D O I：
10.1063/1.4902680
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The free-molecular gas flow through the membrane oscillating in its own plane was studied. Passing probability and velocity distribution function of gas molecules in the membrane were calculated depending on the dimensionless parameters characterizing the geometry of membrane channels, gas molecule mass, gas temperature, frequency and amplitude of the membrane oscillation. It has shown that the conductivity of the membrane for a given gas can be controlled by changing the parameters of forced oscillations.
引用
收藏
页码：836 / 840
页数：5
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