The application of micro-mechanics on MEMS design

被引：0
|
作者：
Liang, XY [1 ]
Liu, XM [1 ]
Zhu, ZG [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Mechatron, Chengdu, Peoples R China
来源：
PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION | 2004年
关键词：
MEMS; design; micro-mechanics;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
One of important part on MEMS designing is to analyze mechanical behavior of the material under the micro-dimension and meso-dimension This paper obtain a method of developing material's geometry models as well as mechanical models in micro-dimension, according to crystal lattice theory and lattice kinetics theory This paper use the method to analyze a micro-accelerometer deformation under 10(5)g acceleration load, and the result shows feasibility of this method.
引用
收藏
页码：283 / 287
页数：5
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