Direct measurement of Vth fluctuation caused by impurity positioning

被引：18

作者：

Tanaka, T ^{[1
]}

Usuki, T ^{[1
]}

Momiyama, Y ^{[1
]}

Sugii, T ^{[1
]}

机构：

[1] Fujitsu Labs Ltd, Quantum Electron Devices Lab, Atsugi, Kanagawa 2430197, Japan

来源：

2000 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS | 2000年

关键词：

D O I：

10.1109/VLSIT.2000.852800

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper studies a local fluctuation or channel impurity on the source edge. Our direct measurement successfully separates the local (intra-FET) and global (inter-FET) factors. The quite local region (much less than L-eff X W-eff) significantly affects V-th distribution in a high Sid, which exceeds the global factor in the smallest MOSFETs. The local fluctuation inevitably affects MOSFETs in SRAM is cells even though global fluctuation is reduced by process optimization.

引用

页码：136 / 137

页数：2

共 50 条

[21] Analyses of 5σ Vth fluctuation in 65nm-MOSFETs using Takeuchi plot
Tsunomura, T.
Nishida, A.
Yano, F.
Putra, A. T.
Takeuchi, K.
Inaba, S.
Kamohara, S.
Terada, K.
Hiramoto, T.
Mogami, T.
2008 SYMPOSIUM ON VLSI TECHNOLOGY, 2008, : 121 - +
[22] THE MEASUREMENT OF FUNCTION FLUCTUATION
GARSIDE, RF
PSYCHOMETRIKA, 1958, 23 (01) : 75 - 83
[23] DIRECT MEASUREMENT OF THE LATTICE AND IMPURITY COMPONENTS OF THE SPIN-LATTICE RELAXATION OF QUADRUPOLE NUCLEI
EFITSENKO, PY
MIKUSHEV, VM
CHARNAYA, EV
JETP LETTERS, 1991, 54 (10) : 587 - 589
[24] A Fast Vth Measurement (FVM) Technique for NBTI Behavior Characterization
Yu, Xiao
Cheng, Ran
Liu, Wei
Qu, Yiming
Han, Jinghui
Chen, Bing
Lu, Jiwu
Zhao, Yi
IEEE ELECTRON DEVICE LETTERS, 2018, 39 (02) : 172 - 175
[25] Acute rib fracture caused by preoperative positioning for direct lateral interbody fusion A case report
Hong, Chang Hwa
Jung, Ki Jin
Soh, Jae Wan
Won, Sung Hun
Hong, Si John
Kim, Chang Hyun
Lee, Hong Seop
Wang, Soon Do
Lee, Won Seok
Kim, Woo Jong
MEDICINE, 2019, 98 (08)
[26] DIRECT COMPUTER POSITIONING
GERTLER, J
INSTRUMENT PRACTICE, 1970, 24 (04): : 246 - &
[27] PROPERTIES OF AN ANDERSON IMPURITY IN THE LOCAL SPIN FLUCTUATION LIMIT
SALOMAA, M
PHYSICA B & C, 1981, 107 (1-3): : 383 - 384
[28] Modulated fluctuation of atomic displacement in a crystal with a single impurity
Peng, F
PHYSICA B-CONDENSED MATTER, 2006, 373 (02) : 194 - 197
[29] FLUCTUATION CONDUCTIVITY OF A SINGLE-IMPURITY KONDO SYSTEM
AHMED, M
JOURNAL OF PHYSICS F-METAL PHYSICS, 1978, 8 (07): : L175 - L178
[30] THE SPIN FLUCTUATION OF AN IMPURITY IN THE TRANSITION-METAL ALLOYS
TSUTSUMI, H
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1983, 31-4 (FEB) : 357 - 358

← 1 2 3 4 5 →