Realization of integrated narrow bandpass filters in the infrared region

被引：0

作者：

Wang, SW ^{[1
]}

Liu, DQ ^{[1
]}

Lin, B ^{[1
]}

Chen, XS ^{[1
]}

Li, ZF ^{[1
]}

Shi, Y ^{[1
]}

Wang, W ^{[1
]}

Lu, W ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China

来源：

CONFERENCE DIGEST OF THE 2004 JOINT 29TH INTERNATIONAL CONFERENCE ON INFRARED AND MILLIMETER WAVES AND 12TH INTERNATIONAL CONFERENCE ON TERAHERTZ ELECTRONICS | 2004年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 mum in this case. The relative full width at half maximum (FWHM) deltalambda/lambda of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.

引用

页码：691 / 692

页数：2

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