A porous silicon based particle filter for microsystems

被引：12
|
作者：
Wallner, J. Z. [1 ]
Bergstrom, P. L. [1 ]
机构：
[1] Michigan Technol Univ, Dept Elect & Comp Engn, Houghton, MI 49931 USA
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2007年 / 204卷 / 05期
关键词：
D O I：
10.1002/pssa.200674387
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A porous silicon (PS) based particle filter has been fabricated and tested for integrated microsystems. By engineering the morphology of the porous silicon membrane, depth filtration with high collection efficiency in the submicron range (0.3 similar to 1 mu m), low pressure-drop, and large filtration capacity (0.5 mg/cm(2)) has been demonstrated. With the PS particle filter, on-board gas filtration can be achieved. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1469 / 1473
页数：5
相关论文
共 50 条
  • [31] Silicon micromachining for integrated microsystems
    Tohoku Univ, Sendai, Japan
    Vacuum, 6-8 (469-474):
  • [32] Particle filter based on strong tracking filter
    Deng, XL
    Guo, WZ
    Xie, JY
    Liu, J
    Proceedings of 2005 International Conference on Machine Learning and Cybernetics, Vols 1-9, 2005, : 658 - 661
  • [33] Particle Swarm Optimization Based on Hybrid Kalman Filter and Particle Filter
    Peng P.
    Chen C.
    Yang Y.
    Journal of Shanghai Jiaotong University (Science), 2020, 25 (06) : 681 - 688
  • [34] Light emitting porous silicon diode based on a silicon/porous silicon heterojunction
    Pavesi, L
    Chierchia, R
    Bellutti, P
    Lui, A
    Fuso, F
    Labardi, M
    Pardi, L
    Sbrana, F
    Allegrini, M
    Trusso, S
    Vasi, C
    Ventura, PJ
    Costa, LC
    Carmo, MC
    Bisi, O
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (11) : 6474 - 6482
  • [35] Distributed Particle Filter Based on Particle Exchanges
    Tang, Rui
    Riemens, Ellen
    Rajan, Raj Thilak
    2023 IEEE AEROSPACE CONFERENCE, 2023,
  • [36] Particle Filter Based on PSO
    Zhang, Gongyuan
    Cheng, Yongmei
    Yang, Feng
    Pan, Quan
    INTERNATIONAL CONFERENCE ON INTELLIGENT COMPUTATION TECHNOLOGY AND AUTOMATION, VOL 1, PROCEEDINGS, 2008, : 121 - 124
  • [37] In situ fabricated porous filters for microsystems
    Moorthy, J
    Beebe, DJ
    LAB ON A CHIP, 2003, 3 (02) : 62 - 66
  • [38] Recent advances in silicon-based neural microelectrodes and microsystems: a review
    Fekete, Zoltan
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 215 : 300 - 315
  • [39] Diaphragm-based Microsystems Using Thin Film Silicon Carbide
    Zorman, Christian A.
    Barnes, Andrew C.
    Feng, Philip X. -L.
    2012 IEEE SENSORS PROCEEDINGS, 2012, : 814 - 817
  • [40] Thermal tuning of a thin-film optical filter based on porous silicon and liquid crystal
    Tkachenko, G. V.
    Shulika, O. V.
    UKRAINIAN JOURNAL OF PHYSICAL OPTICS, 2010, 11 (04) : 260 - 268
12345