Formation of polycrystalline silicon with log-normal grain size distribution

被引：27
|
作者：
Bergmann, RB
Shi, FG
Queisser, HJ
Krinke, J
机构：
[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
[2] Univ Erlangen Nurnberg, Inst Werkstoffwissensch 7, D-91058 Erlangen, Germany
来源：
APPLIED SURFACE SCIENCE | 1998年 / 123卷
关键词：
D O I：
10.1016/S0169-4332(97)00494-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Polycrystalline silicon films, prepared by annealing from amorphous precursors, are analyzed by transmission electron microscopy and reveal a logarithmic-normal distribution of grain sizes. Such size distributions also result from various other crystallization processes from non-crystalline phases. The cessation of nucleation due to the finite amorphous reservoir leads to these logarithmic-normal size distributions. The origin of these observed distributions is a result of nucleation and growth, rather than coarsening of crystallites. (C) 1998 Elsevier Science B.V.
引用
收藏
页码：376 / 380
页数：5
相关论文
共 50 条
  • [41] On the log-normal distribution of stock market data
    Antoniou, I
    Ivanov, VV
    Ivanov, VV
    Zrelov, PV
    PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS, 2004, 331 (3-4) : 617 - 638
  • [42] Confidence Intervals for the Mean of a Log-Normal Distribution
    Olsson, Ulf
    JOURNAL OF STATISTICS EDUCATION, 2005, 13 (01):
  • [43] Log-Normal Distribution Modelling with Quantised Data
    Leech, Sonya
    Malone, David
    Dunne, Jonathan
    2023 34TH IRISH SIGNALS AND SYSTEMS CONFERENCE, ISSC, 2023,
  • [44] LINEAR INTERCEPT LENGTH DISTRIBUTION IN A GRAIN-STRUCTURE MODEL WITH DIAMETER DISTRIBUTION OF LOG-NORMAL FORM
    TAKAYAMA, Y
    TOZAWA, T
    KATO, H
    TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1987, 28 (08): : 631 - 643
  • [45] Tail Departure of Log-Normal Grain Size Distributions in Synthetic Three-Dimensional Microstructures
    Joseph C. Tucker
    Lisa H. Chan
    Gregory S. Rohrer
    Michael A. Groeber
    Anthony D. Rollett
    Metallurgical and Materials Transactions A, 2012, 43 : 2810 - 2822
  • [46] LOG-NORMAL SIZE DISTRIBUTIONS OF ULTRAFINE METAL PARTICLES
    GRANQVIST, CG
    BUHRMAN, RA
    SOLID STATE COMMUNICATIONS, 1976, 18 (01) : 123 - 126
  • [47] LOG-NORMAL OR NORMAL DISTRIBUTION AS A BASIC REQUIREMENT FOR KNOWLEDGE OF NORMAL VALUES
    WEIPPL, G
    PANTLITS.M
    PEDIATRIC RESEARCH, 1970, 4 (02) : 205 - &
  • [48] Tail Departure of Log-Normal Grain Size Distributions in Synthetic Three-Dimensional Microstructures
    Tucker, Joseph C.
    Chan, Lisa H.
    Rohrer, Gregory S.
    Groeber, Michael A.
    Rollett, Anthony D.
    METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2012, 43A (08): : 2810 - 2822
  • [49] GRAIN-SIZE AND SIZE DISTRIBUTION IN HEAVILY PHOSPHORUS DOPED POLYCRYSTALLINE SILICON
    KALAINATHAN, S
    DHANASEKARAN, R
    RAMASAMY, P
    JOURNAL OF CRYSTAL GROWTH, 1990, 104 (02) : 250 - 256
  • [50] Determination of sample size for estimation of fatigue life by using Weibull or log-normal distribution
    Gope, PC
    INTERNATIONAL JOURNAL OF FATIGUE, 1999, 21 (08) : 745 - 752
12345