Laser applications for micromachining

被引：0
|
作者：
Esashi, M [1 ]
Minami, K [1 ]
机构：
[1] TOHOKU UNIV,FAC ENGN,SENDAI,MIYAGI 98077,JAPAN
来源：
LASER INTERACTION AND RELATED PLASMA PHENOMENA | 1996年 / 369期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1268 / 1273
页数：6
相关论文
共 50 条
  • [21] Femtosecond laser micromachining of dielectric materials for biomedical applications
    Farson, Dave F.
    Choi, Hae Woon
    Zimmerman, Burr
    Steach, Jeremy K.
    Chalmers, Jeffery J.
    Olesik, Susan V.
    Lee, L. James
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (03)
  • [22] Applications of laser lithography on oxide film to titanium micromachining
    Chauvy, PF
    Hoffmann, P
    Landolt, D
    APPLIED SURFACE SCIENCE, 2003, 208 : 165 - 170
  • [23] Laser micromachining - new techniques and developments for display applications
    Rizvi, N
    Greuters, J
    Dallimore, J
    Hamilton, K
    Clabburn, R
    Ebsworth, B
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI, 2001, 4274 : 278 - 287
  • [24] Advanced laser micromachining processes for MEMS and optical applications
    Holmes, Andrew S.
    Pedder, James E. A.
    Boehlen, Karl L.
    HIGH-POWER LASER ABLATION VI, PTS 1 AND 2, 2006, 6261
  • [25] LASER MICROMACHINING MODELING AND LASER MACHINED SURFACE ERRORS PREDICTION FOR BIOMEDICAL APPLICATIONS
    Wongwiwat, Plawut
    Narayan, Roger J.
    Lee, Yuan-Shin
    PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, 2012, 2012, : 59 - 68
  • [26] Beam delivery focusing objectives for excimer laser micromachining applications
    Percevault, M
    Wilson, D
    10TH MEETING ON OPTICAL ENGINEERING IN ISRAEL, 1997, 3110 : 624 - 631
  • [27] Editorial for the Special Issue on Femtosecond Laser Micromachining for Photonics Applications
    Crespi, Andrea
    Corrielli, Giacomo
    MICROMACHINES, 2020, 11 (11)
  • [28] Compact high-energy picosecond laser for micromachining applications
    Fürbach, A
    Peng, X
    Turi, L
    Krausz, F
    APPLIED PHYSICS B-LASERS AND OPTICS, 2004, 78 (3-4): : 261 - 264
  • [29] KrF excimer laser micromachining of MEMS materials: characterization and applications
    Liu, Kewei
    NiCkolov, Zhorro
    Oh, Jonghyun
    Noh, Hongseok Moses
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, 22 (01)
  • [30] Compact high-energy picosecond laser for micromachining applications
    Fuörbach A.
    Peng X.
    Turi L.
    Krausz F.
    Applied Physics B, 2004, 78 (3-4) : 261 - 264
12345