Enhanced electron mobility in epitaxial (Ba, La)SnO3 films on BaSnO3(001) substrates

被引:25
|
作者
Lee, Woong-Jhae [1 ]
Kim, Hyung Joon [1 ]
Sohn, Egon [1 ]
Kim, Tai Hoon [1 ]
Park, Ju-Young [1 ]
Park, Woanseo [2 ]
Jeong, Hyunhak [2 ]
Lee, Takhee [2 ]
Kim, Jin Hyeok [3 ]
Choi, Ki-Young [1 ]
Kim, Kee Hoon [1 ,2 ]
机构
[1] Seoul Natl Univ, Ctr Novel States Complex Mat Res, Dept Phys & Astron, Seoul 151747, South Korea
[2] Seoul Natl Univ, Inst Appl Phys, Dept Phys & Astron, Seoul 151747, South Korea
[3] Chonnam Natl Univ, Dept Mat Sci & Engn, Kwangju 500757, South Korea
关键词
TRANSPARENT CONDUCTING OXIDES; PULSED-LASER DEPOSITION; THIN-FILMS; HIGH-PRESSURE; TRANSISTORS; SEMICONDUCTOR; HALL;
D O I
10.1063/1.4942509
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth of Ba1-xLaxSnO3 (x = 0.00, 0.005, 0.01, 0.02, and 0.04) thin films on the insulating BaSnO3(001) substrate by pulsed laser deposition. The insulating BaSnO3 substrates were grown by the Cu2O-CuO flux, in which the molar fraction of KClO4 was systematically increased to reduce electron carriers and thus induce a doping induced metal-insulator transition, exhibiting a resistivity increase from similar to 10(-3) to similar to 10(12) Omega cm at room temperature. We find that all the Ba1-xLaxSnO3 films are epitaxial, showing good in-plane lattice matching with the substrate as confirmed by X-ray reciprocal space mappings and transmission electron microscopy studies. The Ba1-xLaxSnO3 (x = 0.005-0.04) films showed degenerate semiconducting behavior, and the electron mobility at room temperature reached 100 and 85 cm(2) V-1 s(-1) at doping levels 1.3 x 10(20) and 6.8 x 10(19) cm(-3), respectively. This work demonstrates that thin perovskite stannate films of high quality can be grown on the BaSnO3(001) substrates for potential applications in transparent electronic devices. (C) 2016 AIP Publishing LLC.
引用
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页数:5
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