Enhanced electron mobility in epitaxial (Ba, La)SnO3 films on BaSnO3(001) substrates

被引:25
|
作者
Lee, Woong-Jhae [1 ]
Kim, Hyung Joon [1 ]
Sohn, Egon [1 ]
Kim, Tai Hoon [1 ]
Park, Ju-Young [1 ]
Park, Woanseo [2 ]
Jeong, Hyunhak [2 ]
Lee, Takhee [2 ]
Kim, Jin Hyeok [3 ]
Choi, Ki-Young [1 ]
Kim, Kee Hoon [1 ,2 ]
机构
[1] Seoul Natl Univ, Ctr Novel States Complex Mat Res, Dept Phys & Astron, Seoul 151747, South Korea
[2] Seoul Natl Univ, Inst Appl Phys, Dept Phys & Astron, Seoul 151747, South Korea
[3] Chonnam Natl Univ, Dept Mat Sci & Engn, Kwangju 500757, South Korea
关键词
TRANSPARENT CONDUCTING OXIDES; PULSED-LASER DEPOSITION; THIN-FILMS; HIGH-PRESSURE; TRANSISTORS; SEMICONDUCTOR; HALL;
D O I
10.1063/1.4942509
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth of Ba1-xLaxSnO3 (x = 0.00, 0.005, 0.01, 0.02, and 0.04) thin films on the insulating BaSnO3(001) substrate by pulsed laser deposition. The insulating BaSnO3 substrates were grown by the Cu2O-CuO flux, in which the molar fraction of KClO4 was systematically increased to reduce electron carriers and thus induce a doping induced metal-insulator transition, exhibiting a resistivity increase from similar to 10(-3) to similar to 10(12) Omega cm at room temperature. We find that all the Ba1-xLaxSnO3 films are epitaxial, showing good in-plane lattice matching with the substrate as confirmed by X-ray reciprocal space mappings and transmission electron microscopy studies. The Ba1-xLaxSnO3 (x = 0.005-0.04) films showed degenerate semiconducting behavior, and the electron mobility at room temperature reached 100 and 85 cm(2) V-1 s(-1) at doping levels 1.3 x 10(20) and 6.8 x 10(19) cm(-3), respectively. This work demonstrates that thin perovskite stannate films of high quality can be grown on the BaSnO3(001) substrates for potential applications in transparent electronic devices. (C) 2016 AIP Publishing LLC.
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页数:5
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