共 50 条
- [32] Surface Functionalization for Conductivity Improvement by Metal Atomic Layer Deposition 2018 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC), 2018, : 57 - 57
- [34] Functionalization of Fine Particles Using Atomic and Molecular Layer Deposition ATOMIC LAYER DEPOSITION APPLICATIONS 5, 2009, 25 (04): : 163 - 190
- [35] Environmental performance characterization of Atomic Layer Deposition 2008 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRONICS AND THE ENVIRONMENT, 2008, : 200 - 205
- [37] Atomic layer deposition in nanoporous catalyst materials RSC Catalysis Series, 2015, 2015-January (22): : 167 - 197
- [39] Atomic Layer Deposition of Multiferroic Materials (Invited) ATOMIC LAYER DEPOSITION APPLICATIONS 12, 2016, 75 (06): : 119 - 122
- [40] Exploitation of atomic layer deposition for nanostructured materials MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2007, 27 (5-8): : 1504 - 1508