Semiconductor industry faces measurement challenge

被引：0

作者：

Comello, V

机构：

来源：

R&D MAGAZINE | 1998年 / 40卷 / 01期

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D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Among other crucial goals, the industry must quickly develop and deploy a set of cost effective, manufacturing-worthy metrology tools capable of analyzing features down to atomic dimensions.

引用

页码：20 / +

页数：4

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