Fabrication of high-performance InP MESFETs with in-situ pulse-plated metal gates

被引:0
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作者
Uno, S [1 ]
Hashizume, T [1 ]
Sato, T [1 ]
Hasegawa, H [1 ]
机构
[1] HOKKAIDO UNIV,RES CTR INTERFACE QUANTUM ELECTR,SAPPORO,HOKKAIDO 060,JAPAN
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:338 / 341
页数:4
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