A new toroidal electrostatic analyzer and application to surface analysis

A new toroidal electrostatic analyzer (ESA) configuration for medium energy ion scattering has been designed and fabricated for structural analysis of surfaces. The present analyzer has a wide interelectrode distance of 16 mm and an energy range of 10% of the pass energy at a constant applied voltage. The analyzer is mounted horizontally on a turntable and accepts ions scattered within a well defined angular range. To get a good energy resolution, we employed a photon-counting image acquisition system (PIAS: Hamamatsu Photonics) with spatial resolution of 40-50 mu um, combined with a three-stage microchannel plate. The electric fields of the toroidal ESA including the fringing fields were calculated by a finite element method. Ion trajectories through the analyzer were calculated using a Monte Carlo method. In this way, the optimum conditions of the geometry and size of the entrance and exit slits were determined. Our toroidal analyzer resolved three surface peaks from the Si isotopes (Si-28, Si-29. and Si-30) clearly in the aligned spectra from H-terminated Si(001) and Si(111) and the energy resolution (Delta E/E) was estimated to be about 1 x 10(-3). We describe the notable features of the new setup of the toroidal analyzer and show direct detection of H on Si(001) and Si(111) as a typical application. (C) 1998 American Institute of Physics.