Design and 3-D Electric Field Simulation of a Calculable Capacitor

被引:0
|
作者
Wang, Yicheng [1 ]
Lawall, John [1 ]
Pratt, Jon [1 ]
Gong, Bo [1 ]
Lee, Rae Duk [2 ]
Kim, Han Jun [2 ]
Yoon, Sae Won [2 ]
机构
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20874 USA
[2] Korea Res Inst Stand & Sci, Daejeon, South Korea
关键词
calculable capacior; interferometers; electric field simulations;
D O I
暂无
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new calculable capacitor with an operating range of 0.1 pF is being developed at NIST. Reduced uncertainty for displacement measurements, enabled by employing tunable laser based Fabry-Perot interferometers, will allow a considerably more compact design, minimizing errors from mechanical sources. Using 3-D electric field simulations, we have also estimated errors resulting from mechanical imperfections.
引用
收藏
页码:1223 / +
页数:2
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