A high-precision instrument for mapping of rotational errors in rotary stages

被引：14

作者：

Xu, Weihe ^{[1
]}

Lauer, Kenneth ^{[1
]}

Chu, Yong ^{[1
]}

Nazaretski, Evgeny ^{[1
]}

机构：

[1] Brookhaven Natl Lab, Upton, NY 11973 USA

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2014年 / 21卷

关键词：

high-precision instrument; rotational errors; rotary stages; RAY; RESOLUTION;

D O I：

10.1107/S160057751401618X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.

引用

页码：1367 / 1369

页数：3

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