A DUAL-BAND TERAHERTZ FOCAL PLANE ARRAY FOR MATERIAL COMPOSITION IDENTIFICATION BY SPECTRAL IMAGING

被引：1
|
作者：
Xu, Jia [1 ]
Miao, Jiahao [1 ]
Liu, Yi [1 ]
Yu, Xiaomei [1 ]
机构：
[1] Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
来源：
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年
基金：
中国国家自然科学基金;
关键词：
Terahertz; dual-band THz FPA; metamaterial absorber; bi-material microcantilever; spectral imaging;
D O I：
10.1109/MEMS51670.2022.9699737
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a dual-band terahertz (THz) bi-material microcantilever focal plane array (FPA) for material composition identification by a spectral imaging method. To achieve the THz spectral imaging, a dual-band metamaterial absorber (MA) working at 2.52 THz and 3.11 THz was integrated into the bi-material microcantilever by introducing multiplexed Au cross resonators on a SiNx dielectric layer. The FPA works based on a photo-thermomechanical effect with the SiNx dielectric layer also as a structural layer, and an Au layer that functions both as a mirror of the bi-material microcantilever and a ground plane of the MA. Finally, THz spectral images of tablets with different ingredients, metal stripes on a polytetrafluoroethylene (PTFE) plate, and copper holes on a PCB were captured successfully with the fabricated dual-band FPA.
引用
收藏
页码：1054 / 1057
页数：4
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