A DUAL-BAND TERAHERTZ FOCAL PLANE ARRAY FOR MATERIAL COMPOSITION IDENTIFICATION BY SPECTRAL IMAGING

被引：1

作者：

Xu, Jia ^{[1
]}

Miao, Jiahao ^{[1
]}

Liu, Yi ^{[1
]}

Yu, Xiaomei ^{[1
]}

机构：

[1] Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

来源：

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年

基金：

中国国家自然科学基金;

关键词：

Terahertz; dual-band THz FPA; metamaterial absorber; bi-material microcantilever; spectral imaging;

D O I：

10.1109/MEMS51670.2022.9699737

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a dual-band terahertz (THz) bi-material microcantilever focal plane array (FPA) for material composition identification by a spectral imaging method. To achieve the THz spectral imaging, a dual-band metamaterial absorber (MA) working at 2.52 THz and 3.11 THz was integrated into the bi-material microcantilever by introducing multiplexed Au cross resonators on a SiNx dielectric layer. The FPA works based on a photo-thermomechanical effect with the SiNx dielectric layer also as a structural layer, and an Au layer that functions both as a mirror of the bi-material microcantilever and a ground plane of the MA. Finally, THz spectral images of tablets with different ingredients, metal stripes on a polytetrafluoroethylene (PTFE) plate, and copper holes on a PCB were captured successfully with the fabricated dual-band FPA.

引用

页码：1054 / 1057

页数：4

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