Fabrication of nano-sized indiurn oxide powder below 50nm by spray pyrolysis process

Nano-sized indium oxide powder is generated from the indium chloride solution by the spray pyrolysis process. As the reaction temperature increases from 850 to 1000 C, the average particle size of the generated powder increases from around 30 nm to 100 nm, the microstructure gradually becomes solid, the XRD peak intensity gradually increases. As the indium concentration of the raw material solution increases from 40 to 350 g/l, the average particle size of the powder gradually increases from 30 to 60 run, yet the distribution of the particle size appears more irregular. Along with the increase of concentration, the XRD peak intensity gradually increases.