Influence research of fabrication errors on modal amplitude in a dual mass silicon micro-gyroscope

被引：0
|
作者：
Di, Hu [1 ,2 ]
Bo, Yang [1 ,2 ]
Bo, Dai [1 ,2 ]
机构：
[1] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Jiangsu, Peoples R China
[2] Minist Educ, Key Lab Microinertial Instrument & Adv Nav Techno, Nanjing 210096, Jiangsu, Peoples R China
来源：
PROCEEDINGS OF THE 2015 JOINT INTERNATIONAL MECHANICAL, ELECTRONIC AND INFORMATION TECHNOLOGY CONFERENCE (JIMET 2015) | 2015年 / 10卷
关键词：
silicon micro-gyroscope; fabrication error; amplitude ratio;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon micro gyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in anti-phase driving mode. The amplitude ratio is increased to -0.800 when the left stiffness error is 5% in anti-phase sensing mode.
引用
收藏
页码：1199 / 1203
页数：5
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