Nanoscale surface modification and nanostructural fabrication of YBa2Cu3O7-x thin films by scanning tunneling microscopy

The scanning tunneling microscope has been used to modify the surface of YBa2Cu3O7-x (YBCO) high T-c. superconducting thin films by operating the instrument in the so-called mechanical milling or field-induced evaporation mode. Nanostructures such as holes, lines, and trenches were fabricated on the YBCO thin film surface in a controlled manner. In the surface modification and nanostructure fabrication processes, the effect of bias voltage, tunneling current, and scanning feedback control parameters on the modification efficiency have been investigated. (C) 2000 American Vacuum Society. [S0734-211X(00)03205-4].