Input impedance of a powerful single-core ferromagnetic inductively coupled plasma source

被引：5

作者：

Bliokh, Y. P. ^{[1
]}

Brodsky, Yu L. ^{[1
]}

Chashka, Kh B. ^{[1
]}

Felsteiner, J. ^{[1
]}

Slutsker, Ya Z. ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel

来源：

JOURNAL OF APPLIED PHYSICS | 2010年 / 107卷 / 01期

关键词：

discharges (electric); electric impedance; ferromagnetic materials; magnetic cores; plasma density; plasma sources;

D O I：

10.1063/1.3273499

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An experimental study of the recently developed version of the ferromagnetic inductively coupled plasma source has shown that under certain circumstances its input impedance becomes almost independent of the delivered rf driving power and (therefore) of the produced plasma density. This plasma source consists of a large ferromagnetic core, which is fully immersed in plasma. This core is surrounded by a primary winding and plasma appears due to gas discharge driven by an rf voltage applied to this primary winding. We have found values of parameters which determine the input impedance in such an "independent" regime and derived a quantitative theory which is in good agreement with the measured impedance values.

引用

页数：6

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