Longitudinal distribution of electrical parameters in normal glow discharge

被引：11
|
作者：
Timerkaev, B. A. [1 ]
Ahmetov, M. M. [1 ]
Zalyaliev, B. R. [1 ]
Petrova, O. A. [1 ]
Israfilov, D. I. [1 ]
机构：
[1] Kazan Natl Res Tech Univ, Kazan 420111, Republic Of Tat, Russia
来源：
VI SCIENTIFIC TECHNICAL CONFERENCE ON LOW-TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS | 2014年 / 567卷
关键词：
D O I：
10.1088/1742-6596/567/1/012036
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The behavior of the glow discharge at low pressure is considered.
引用
收藏
页数：5
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