Capacitive Humidity Sensor Based on Carbon Black/Polyimide Composites

被引:32
|
作者
Kim, Jihong [1 ]
Cho, Jang-Hoon [2 ]
Lee, Hyung-Man [2 ]
Hong, Sung-Min [2 ]
机构
[1] Yeungnam Univ, Dept Elect Engn, Gyongsan 38541, South Korea
[2] Korea Elect Technol Inst, Smart Sensor Res Ctr, Seongnam 13509, South Korea
关键词
humidity sensor; capacitive humidity sensor; polyimide; carbon black; THIN-FILMS; FABRICATION; ELECTRODE; POLYMERS; MOISTURE;
D O I
10.3390/s21061974
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A novel capacitive humidity sensor based on carbon black/polyimide composites is presented in this paper. The details of the fabrication, sensor characteristics, and effect of the carbon black additive are described. It was confirmed that the polyimide composite filled with a tiny amount of carbon black was suitable for a humidity sensing dielectric. The humidity sensors with three different dielectrics, which were pure polyimide, 0.01 wt% carbon black/polyimide, and 0.05 wt% carbon black/polyimide, were fabricated by a micro-electro-mechanical-system (MEMS) process. As the amount of the carbon black additive increased, the sensitivity of the humidity sensor increased. The humidity sensor with 0.05 wt% of carbon black had a much higher sensitivity of 15.21% (20-80% RH, 0.2535%/% RH) than that of the sensor with pure polyimide, which was 9.73% (0.1622%/% RH). The addition of carbon black also led to an enhancement in the hysteresis and response speed. The hysteresis of the humidity sensor decreased from 2.17 to 1.80% when increasing the amount of the carbon black additive. The response speed of the humidity sensor with 0.05 wt% of carbon black was measured to be similar to 10% faster than that of the sensor with pure polyimide. The long-term stability of the humidity sensors was demonstrated as well.
引用
收藏
页码:1 / 11
页数:11
相关论文
共 50 条
  • [41] A flexible capacitive pressure sensor based on an electrospun polyimide nanofiber membrane
    Zhu, Yuchao
    Wu, Yigen
    Wang, Guangshun
    Wang, Zhongbao
    Tan, Qiulin
    Zhao, Libo
    Wu, Dezhi
    ORGANIC ELECTRONICS, 2020, 84
  • [42] Capacitive Humidity Sensors Using Highly Durable Polyimide Membrane
    Niimi, Naohisa
    Yoshida, Takahiko
    Isogai, Toshiki
    SAE INTERNATIONAL JOURNAL OF PASSENGER CARS-ELECTRONIC AND ELECTRICAL SYSTEMS, 2013, 6 (01): : 328 - 334
  • [43] A capacitive differential pressure sensor with polyimide diaphragm
    Pedersen, M
    Meijerink, MGH
    Olthuis, W
    Bergveld, P
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) : 250 - 252
  • [44] Optical fiber humidity sensor based on the direct response of the polyimide film
    Bian, Ce
    Hu, Manli
    Wang, Ruohui
    Gang, Tingting
    Tong, Rongxin
    Zhang, Lisong
    Guo, Teng
    Liu, Xiaobo
    Qiao, Xueguang
    APPLIED OPTICS, 2018, 57 (02) : 356 - 361
  • [45] ANN modeling of a smart MEMS-based capacitive humidity sensor
    Kouda Souhil
    Dibi Zohir
    Barra Samir
    Dendouga Abdelghani
    Meddour Fayçal
    International Journal of Control, Automation and Systems, 2011, 9 : 197 - 202
  • [46] Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor †
    Feng, Jinfeng
    Kang, Xiaoxu
    Zuo, Qingyun
    Yuan, Chao
    Wang, Weijun
    Zhao, Yuhang
    Zhu, Limin
    Lu, Hanwei
    Chen, Juying
    SENSORS, 2016, 16 (03):
  • [47] The Effects of Fabrication Process on the Performance of a CMOS based Capacitive Humidity Sensor
    Saeidi, N.
    Blake, A.
    Colinge, C.
    Burke, M.
    Quinn, A. J.
    Demosthenous, A.
    Donaldson, N.
    SENSORS, ACTUATORS, AND MICROSYSTEMS (GENERAL) - 219TH ECS MEETING, 2011, 35 (30): : 71 - 78
  • [48] ELECTRONIC DAMPNESS MEASUREMENTS ON WOODEN MATERIALS BASED ON A CAPACITIVE HUMIDITY SENSOR
    DREWES, H
    MEHLHORN, L
    HOLZ ALS ROH-UND WERKSTOFF, 1986, 44 (04) : 150 - 150
  • [49] ANN Modeling of a Smart MEMS-based Capacitive Humidity Sensor
    Souhil, Kouda
    Zohir, Dibi
    Samir, Barra
    Abdelghani, Dendouga
    Faycal, Meddour
    INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS, 2011, 9 (01) : 197 - 202
  • [50] POLYMER-BASED CAPACITIVE HUMIDITY SENSOR - CHARACTERISTICS AND EXPERIMENTAL RESULTS
    DELAPIERRE, G
    GRANGE, H
    CHAMBAZ, B
    DESTANNES, L
    SENSORS AND ACTUATORS, 1983, 4 (01): : 97 - 104