Interference technique by three equal-intensity umbrellalike beams with a diffractive beam splitter for fabrication of two-dimensional trigonal and square lattices

被引:5
|
作者
Yang, XL [1 ]
Cai, LZ [1 ]
Wang, YR [1 ]
Liu, Q [1 ]
机构
[1] Shandong Univ, Dept Opt, Jinan 250100, Peoples R China
关键词
interference; polarization; holographic interferometry; lithography; photonic crystals; microstructure fabrication;
D O I
10.1016/S0030-4018(03)01231-8
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A systematic and comprehensive analysis of interference of three equal-intensity umbrellalike beams (ITUB) is provided based on the traditional interference theory. It shows that identical two-dimensional (213) bright and dark lattices with spacing of the order of wavelength can be fabricated and a partial uniform contrast can be obtained by properly adjusting polarization of each beam. This study may lay a theoretical foundation for holographic fabrication of 2D periodical microstructures such as trigonal or square lattices. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:325 / 332
页数:8
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