Fabrication of two-dimensional lattices by using photosensitive sol-gel and four-beam laser interference

被引:7
|
作者
Wang, Zhezhe [1 ,2 ]
Zhao, Gaoyang [2 ]
Zhang, Xiaolei [2 ]
Heguang, Liu [2 ]
Zhao, Nana [2 ]
机构
[1] Fujian Normal Univ, Dept Phys, Fuzhou 350007, Fujian, Peoples R China
[2] Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Photosensitivity; Sol-gel films; Lasers; Diffractive optics; LITHOGRAPHY; FILMS; ABLATION; ARRAYS;
D O I
10.1016/j.jnoncrysol.2010.11.013
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This work demonstrates a promising method to fabricate 2D lattices by using photosensitive sol-gel method combining with four-beam of a 350.7 nm Kr ion laser interference. Photosensitive TiO2 gel films with chelate complexes as precursors are fabricated. The characteristics of UV and IR spectra of the films and their variations in the process of laser irradiation are investigated. The results show that the gel films had an absorption peak at about 358 nm due to the formation of chelate complex. This peak gradually decreases with irradiation in time, which indicates the photosensitive properties of the TiO2 films. A flexible four-beam interference system is proposed. Given incident angles 20.5 degrees and 44.5 degrees, the lattices with pitch of 700 nm and 326 nm are fabricated, respectively. The diffraction phenomenon of the 700 nm lattices is investigated by inverse method. The results are fully consistent with the 2D crystal diffraction theory. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:1223 / 1227
页数:5
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