Fabrication and characterization of PZT-PMWSN thin film using pulsed laser deposition

Thin PZT films are being developed for use in sensor and actuator application in micromechanical systems. For the use as sensor and actuator, it is desirable to combine high mechanical quality factor (Q(m)) with high piezoelectric constant (d) and high electro-mechanical coupling factor (k(p)). We fabricated PbZrxTi1-xO3-Pb(Mn,W,Sb,Nb)O-3 (PZT-PMWSN) targets with variations in the Zr/Ti ratio. The dielectric and piezoelectric properties of PZT-PMWSN ceramics were investigated as a function of Zr/Ti ratio. At the Zr/Ti ratio of 0.52/0.48, the electrical coupling factor (kp) and the mechanical quality factor (Q) showed a maximum value of 0.56 and 2344, respectively. The PZT-PMWSN thin film has been prepared on a Pt/Ti/SiO2/Si Substrate using pulsed laser deposition method. The structural property was characterized with XRD, SEM and ferroelectric hysteresis loop measurement were used to characterize the electrical properties of PZT-PMWSN thin film. (C) 2002 Elsevier Science Ltd. All rights reserved.