Pyroelectric properties of La-modified PbTiO3 thin films and their applications

被引：4
|
作者：
Takayama, R [1 ]
Kamada, T [1 ]
Fujii, SHS [1 ]
Tomozawa, A [1 ]
Deguchi, T [1 ]
Hirao, T [1 ]
机构：
[1] MATSUSHITA ELECT IND CO LTD,AIR CONDITIONING RES LAB,SHIGA,JAPAN
来源：
FERROELECTRICS | 1997年 / 195卷 / 1-4期
关键词：
D O I：
10.1080/00150199708260543
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly c-axis oriented La-modified PbTiO3(Pb1-xLaxTi1-x/4O3;PLT) thin films were successfully grown on MgO single crystal substrates by rf-magnetron sputtering method. The PLT thin films display the phenomenon named ''self-polarization'' and have high figures of merit for pyroelectric infrared(IR) sensor without a poling treatment. It was found that this self-polarization depends on the substrate temperature and is based on a fairly small difference of the thin film composition:Pb/Ti. High performance IR sensors were fabricated by using the PLT (x=0.1, gamma=5.5x10(-8)C/cm(2)K, epsilon(r)=180) thin films and a new 3-dimensional structure. The sensors have remarkably high D* of 3.5x10(8)cmHz(1/2)W and very fast response.
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页码：311 / 316
页数：6
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